Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters
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چکیده
منابع مشابه
Imaging the separation of cathodic arc plasma and macroparticles in curved magnetic filters
Cathodic vacuum arc plasmas can be used to produce well adherent, dense, highquality films and coatings provided macroparticles are removed from the plasma. Both plasma and macroparticles are produced at cathode spots, and in most cases both can easily be observed because they emit light. The nature of this light emission is briefly discussed. Using open, curved solenoids as magnetic filters, o...
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Curved magnetic filters are often used for the removal of macroparticles from cathodic arc plasmas. This study addresses the need to further reduce losses and improving plasma throughput. The central figure of merit is the system coefficient, κ , defined as filtered ion current normalized by the plasma-producing arc current. The coefficient κ is investigated as a function of continuous and puls...
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ژورنال
عنوان ژورنال: IEEE Transactions on Plasma Science
سال: 2002
ISSN: 0093-3813
DOI: 10.1109/tps.2002.1003947